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Theoretical and experimental investigation of secondary electron emission characteristics of MgO coating produced by atomic layer deposition
Junjiang Guo; Dan Wang; Kaile Wen; Yantao Xu; Xiangping Zhu; Lutao Liu; Weiwei Cao; Jinhai Si; Min Lu; Haitao Guo
作者部门先进光电与生物材料中心
发表期刊Ceramics International
ISSN0272-8842;1873-3956
产权排序1
摘要

Atomic layer deposition (ALD) is utilized to prepare thin MgO coatings 1–50 nm on Si substrate. In addition, secondary electron emission (SEE) coefficient of MgO/Si double-layered structure is evaluated as a function of coating thickness and primary electron (PE) energy. After neutralizing the surface of test specimen, we have accurately analyzed the relationship between secondary electron yield (SEY) of MgO coating and PE energy. Meanwhile, SEE characteristics of MgO/Si double-layered structure have been systematically analyzed. A maximum SEY value of 6.15 has been achieved at coating thickness of 30 nm and PE energy of 550 eV. Furthermore, theoretical model is established by using Dionne's SEE model to analyze experimentally measured SEY data, demonstrating consistency between experimentally measured and theoretically calculated results. This work demonstrates that SEE level of MgO coating can be optimized by tuning coating thickness and presents novel insights into SEE characteristics of composite materials. Those results can serve as a baseline for further design and fabrication of a wide array of electronic devices.

关键词MgO coating Secondary electron emission Atomic layer deposition (ALD) Microchannel plate (MCP)
DOI10.1016/j.ceramint.2019.12.067
语种英语
出版者ELSEVIER SCI LTD
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文献类型期刊亚洲彩票app下载
条目标识符/handle/181661/67912
专题先进光电与生物材料研究室
作者单位1.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an, 710119, China
2.Key Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi'an Jiaotong University, Xi'an, 710049, China
3.University of Chinese Academy of Sciences (UCAS), Beijing, 100049, PR China
4.Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi, 030006, People's Republic of China
5.School of Microelectronics, Xi'an Jiaotong University, Xi'an, 710049, China
6.State Key Laboratory of Institute of High Energy Physics Chinese Academy of Sciences, University of Chinese Academy of Sciences (UCAS), Beijing, 100049, China
推荐引用方式
GB/T 7714
Junjiang Guo,Dan Wang,Kaile Wen,et al. Theoretical and experimental investigation of secondary electron emission characteristics of MgO coating produced by atomic layer deposition[J]. Ceramics International.
APA Junjiang Guo.,Dan Wang.,Kaile Wen.,Yantao Xu.,Xiangping Zhu.,...&Haitao Guo.
MLA Junjiang Guo,et al."Theoretical and experimental investigation of secondary electron emission characteristics of MgO coating produced by atomic layer deposition".Ceramics International
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